PRODUCTS

WS-8800
Fully automatic sorting system with transport robot by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

Full Automatic

Measurement of resistivity, thickness, conductivity(P/N) and temperature
Tester self-test function, wide measuring range
Thickness, measurement position and temperature correction function for silicon resistivity
Number of cassette station can be changed by customers request
Host (CIM) communication and SMIF or FOUP compatible

Video

Details

Applications

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Others (*Please contact us for details)

Sample sizes

3 ~ 8 inch (or 12 inch)

Measuring range

[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq

Contact type resistance measurement
Fully automatic (with sample transfer system)

WS-3000

Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method

RT-3000/RG-2000AL(RG-3000AL)

Fully automatic system with one cassette station by 4 point probe method

RT-3000/RS-1300

Global standard fully automatic measurement system in the flat panel field by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer