PRODUCTS

WS-3000
Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

Full Automatic

Automatic probe head selection(exchanger) among 4 kinds of probe head
[No need to exchange a probe head by each different sample measurement]
Edge 1mm measurement is available by dual meas. mode
High cost performance from high speed measurement
FOUP compatible, GEM / SECS compatible

Details

Applications

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Conductive thin film (Metal, ITO etc)
• Diffused sample (or layer)
• Silicon-related epitaxial materials, Ion-implantation sample
• Others (*Please contact us for details)

Sample sizes

~300mm (and/or Optional 200mm)

Measuring range

[RS] 1m~10M Ω/sq

Size

RT-3000: 約W250×D323×H135 mm
Approx. 6kg

Contact type resistance measurement
Fully automatic (with sample transfer system)

WS-8800

Fully automatic sorting system with transport robot by 4 point probe method

RT-3000/RG-2000AL(RG-3000AL)

Fully automatic system with one cassette station by 4 point probe method

RT-3000/RS-1300

Global standard fully automatic measurement system in the flat panel field by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer