PRODUCTS

RT-3000/RG-2000AL(RG-3000AL)
Fully automatic system with one cassette station by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

Full Automatic

Widest measuring range in the world and High accuracy measurement for semiconductor
User programmable measurement pattern
Tester self-test function
Thickness, edge, temperature correction for silicon wafer
Film thickness conversion function from sheet resistance
Work efficiency with one cassette station

Details

Applications

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Others (*Please contact us for details)

Sample sizes

6, 8 inch (or 12 inch)

Measuring range

[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq

Contact type resistance measurement
Fully automatic (with sample transfer system)

WS-8800

Fully automatic sorting system with transport robot by 4 point probe method

WS-3000

Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method

RT-3000/RS-1300

Global standard fully automatic measurement system in the flat panel field by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer