PRODUCTS

RT-3000/RS-1300
Global standard fully automatic measurement system in the flat panel field by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

Full Automatic

Standard model in the world for the flat panel sheet resistance measurement system
Tester self-test function, Measurement position correction function, wide measurement range
Min. 0.1 mm meas. resolution and user programmable test pattern
Glass map (search) function
Host (CIM) communication, 2-D /3-D Mapping software

Details

Applications

• Conductive thin film (Metal, ITO etc)
• Silicon-related thin films (LTPS etc), IGZO

Sample sizes

~1,500 x 1,850mm

Measuring range

1. RT-3000/S version;
[RS] 1m~10M Ω/sq

2. RT-3000/H version;
［RS] 10mΩ/sq?1GΩ/sq

Contact type resistance measurement
Fully automatic (with sample transfer system)

WS-8800

Fully automatic sorting system with transport robot by 4 point probe method

WS-3000

Fully automatic measurement system for semiconductor process evaluation (thin film) by 4 point probe method

RT-3000/RG-2000AL(RG-3000AL)

Fully automatic system with one cassette station by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer