PRODUCTS

TCR-600
Resistivity measuring instrument with temperature control system by 4 point probe method

Selling Points

1POINT

Contact type

PC & Software

• Controlled Thermo-chuck (room temperature～600℃/less than 20 minutes)
• 600C compatible probe head with 1mm linear
• Controlled with vacuum sensor, digital thermo-meter, vacuum gauge and gas flow meter
• Temperature measuring accuracy：±（0.5% + 1℃）

Details

Applications

• Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• Conductive thin film (Metal, ITO etc)
• Others (*Please contact us for details)

Sample sizes

φ10mm or 5mmX10mm～35mmX35mm or others

Measuring range

10μ～100kΩ・cm

Contact type resistance measurement
Manual (1 point measurement)

RT-70V series

Simple measuring instrument of resistivity/sheet resistance by 4 point probe method

DUORES

Handy type sheet resistance measuring tool [compatible both 4 point probe method and non-destructive (eddy current method) probes]

Product Information

Contact type resistance measurement

• Semi-automatic (Multi point measurement)
• Fully automatic (with sample transfer system)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer