PRODUCTS

Cresbox
Semi-automatic / small foot print measuring instrument of resistivity / sheet resistance by 4 point probe method

Selling Points

MULTI POINT

Contact type

PC & Software

User programmable measurement pattern
Tester self-test function, small foot print
Thickness, edge, temperature correction for silicon wafer
Film thickness conversion function from sheet resistance

Video

Details

Applications

• Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
• Conductive thin film (Metal, ITO etc)
• Diffused sample (or layer)
• Silicon-related epitaxial materials, Ion-implantation sample
• Others (*Please contact us for details)

Sample sizes

~ 8 inch, ~156x156mm

Measuring range

[R] 1m~300k Ω・cm
[RS] 5m~10M Ω/sq

Size

W330×D600×H340 mm
Approx. 36 kg

Contact type resistance measurement
Semi-automatic (Multi point measurement)

RT-3000/RG-2000 (RG-3000)

Semi-automatic / wide range measuring instrument of resistivity / sheet resistance by 4 point probe method

RG-200PV

Semi-automatic measuring instrument of resistivity / sheet resistance for solar cell by 4 point probe method

Product Information

Contact type resistance measurement

• Manual (1 point measurement)
• Fully automatic (with sample transfer system)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer