RT-3000/RG-2000(RG-3000)
Semi-automatic / wide range measuring instrument of resistivity / sheet resistance by 4 point probe method
Selling Points
Widest measuring range in the world and High accuracy measurement for semiconductor
User programmable measurement pattern
Tester self-test function
Thickness, edge, temperature correction for silicon wafer
Film thickness conversion function from sheet resistance
Details
Applications
- Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
- Conductive thin film (Metal, ITO etc)
- Diffused sample (or layer)
- Silicon-related thin films (LTPS etc), IGZO
- Silicon-related epitaxial materials, Ion-implantation sample
- Others (*Please contact us for details)
Sample sizes
WS-8800 : ~ 8 inch, ~156x156mm
-Option(Large size stage: Model RG-3000); ~12 inch, ~210x210mm
WS-3000 : 3~12 inch (and/or Optional 8 inch)
Measuring range
1. RT-3000/S version;
[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq
2. RT-3000/H version;
［RS] 10mΩ/sq?1GΩ/sq
Size
RT-3000: W250 x D323 x H135 mm
Approx. 6kg
RG-2000: W1,020 x D490 x H408 mm
Approx. 90kg
RG-3000: W935×D564×H471mm
Approx. 95kg
Contact type resistance measurement
Semi-automatic (Multi point measurement)
Product Information
Contact type resistance measurement
Products Lineups
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Contact type resistance measurement
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Non-Contact type resistance measurement
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Lifetime measurement
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Flatness/Thickness measurement
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Spreading resistance measurement
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PN type checker
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4 point probe head
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Resistivity Reference wafer
Measurement principles & methods of Resistance Download by PDF file
*If you want PDF file [Measurement principles & methods of Resistance], please click here.