PRODUCTS

NC-2000FLA
Fully automatic robot transfer sorting system of resistivity and flatness by eddy current/capacitance method (Non-contact)

Selling Points

MULTI POINT

NON-Contact type

PC & Software

Full Automatic

Non-contact measurement of resistivity, Flatness (thickness) and conductivity (P/N)
Number of cassette station can be changed by customers request
Eddy current method for resistivity, Electric capacitance method for wafer thickness
Temperature correction function for silicon wafer

Details

Sample sizes

3～8inch

Measuring range

[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
（1）Low：0.01～0.5Ω/□（0.001～0.05Ω·cm）
（2）Middle：0.5～10Ω/□（0.05～0.5Ω·cm）
（3）High：10～1000Ω/□（0.5～60Ω·cm）
（4）S-High：1000～3000Ω/□（60～200Ω·cm）

Non-Contact type resistance measurement
Fully automatic (with sample transfer system)

NC-6800

Fully automatic belt transfer sorting system by eddy current method (Non-contact)

NC-600MAP

Measurement system with one cassette station of sesistivity / sheet resistnace by eddy current method (Non-cntact)

Product Information

Non-Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)
• Built-in module

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer