PRODUCTS

NC-110（NC-110PV）
Built-in module of resistivity for semicoductor by eddy current method (Non-contact)

Selling Points

MULTI POINT

NON-Contact type

PC & Software

In-line module

Possible to measure sheet resistance without contact by Max. 3 types of probes
Suitable for production line and tranceportation system
Connect to host PC by LAN to send measurement command and data

Details

Applications

• Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
• New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
• Conductive thin film (Metal, ITO etc)
• Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
• Others (*Please contact us for details)

Sample sizes

2 ~ 8 inch, ~156x156mm
(Option; ~12 inch, ~210x210mm)

Measuring range

[R] 1m ~ 200 Ω・cm (NC-110PV : 0.2 ~ 20 Ω・cm for solar wafer)
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.

*Please refer the measurement range for each probe type as below;
（1）Low：0.01～0.5Ω/□（0.001～0.05Ω·cm）
（2）Middle：0.5～10Ω/□（0.05～0.5Ω·cm）
（3）High：10～1000Ω/□（0.5～60Ω·cm）
（4）S-High：1000～3000Ω/□（60～200Ω·cm）

Non-Contact type resistance measuremen
Built-in module

NC-600, NC-700

Built-in module of resistivity flat panel displayr by eddy current method (Non-contact)

Product Information

Non-Contact type resistance measurement

• Manual (1 point measurement)
• Semi-automatic (Multi point measurement)
• Fully automatic (with sample transfer system)

Products Lineups

• Contact type resistance measurement
• Non-Contact type resistance measurement
• Lifetime measurement
• Flatness/Thickness measurement
• Spreading resistance measurement
• PN type checker
• 4 point probe head
• Resistivity Reference wafer