EC-80P（Portable）
Handy type measuring tool of resistivity / sheet ressistance by eddy current method (Non-damage)
Selling Points
Auto-measurement start by probe head contacting to sample
3 measurement modes for wafer resistivity, bulk resistivity and sheet resistance
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range
Resistivity probe can be changed by sample’s resistivity range
Video
Details
Applications
- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
- Conductive thin film (Metal, ITO etc)
- Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
- Others (*Please contact us for details)
Sample sizes
Any size and shape can be measured(*Larger than 20mmφ and measurement plane must be flat)
Measuring range
[R] 1m ~ 200Ω・cm
[RS] 10m ~ 3,000Ω/sq
*The range is separated from each Low, Middle, High S-High, Solar-wafer probe type.
*Please refer the measurement range for each probe type as below;
（1）Low：0.01～0.5Ω/□（0.001～0.05Ω·cm）
（2）Middle：0.5～10Ω/□（0.05～0.5Ω·cm）
（3）High：10～1000Ω/□（0.5～60Ω·cm）
（4）S-High：1000～3000Ω/□（60～200Ω·cm）
（5）Solar Wafer：5～500Ω/□（0.2～15Ω·cm）
Size
- Main unit: W255 x D275 x H95mm, 4kg.
- Probe: 20 mm dia. x 80 mm.
Non-Contact type resistance measurement
Manual (1 point measurement)
Product Information
Non-Contact type resistance measurement
- Semi-automatic (Multi point measurement)
- Fully automatic (with sample transfer system)
- Built-in module
Products Lineups
-
Contact type resistance measurement
-
Non-Contact type resistance measurement
-
Lifetime measurement
-
Flatness/Thickness measurement
-
Spreading resistance measurement
-
PN type checker
-
4 point probe head
-
Resistivity Reference wafer
Measurement principles & methods of Resistance Download by PDF file
*If you want PDF file [Measurement principles & methods of Resistance], please click here.