NC-80MAP
Semi-automatic / wide range measuring instrument of resistivity / sheet resistance by eddy current method (Non-contact)
Selling Points
Possible to measure wide range of sheet resistance by installing Max. 4 probes
Min. 8 mm position from edge can be measured
User programable measurement pattern & programmable measuring pattern
*Option: thickness measurement probe (for silicon wafer)
Video
Details
Applications
- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
- Conductive thin film (Metal, ITO etc)
- Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
- Others (*Please contact us for details)
Sample sizes
2 ~ 8 inch (Option; 12 inch)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
* The range is separated from each Low, Middle, High and S-High probe type.
*Please refer the measurement range for each probe type as below;
(1)Low:0.01~0.5Ω/□(0.001~0.05Ω·cm)
(2)Middle:0.5~10Ω/□(0.05~0.5Ω·cm)
(3)High:10~1000Ω/□(0.5~60Ω·cm)
(4)S-High:1000~3000Ω/□(60~200Ω·cm)
Size
W 780 × D 580 × H 375 mm
Approx. 70 kg
Non-Contact type resistance measurement
Semi-automatic (Multi point measurement)
Product Information
Non-Contact type resistance measurement
Products Lineups
- Contact type resistance measurement
- Non-Contact type resistance measurement
- Lifetime measurement
- Flatness/Thickness measurement
- Spreading resistance measurement
- PN type checker
- 4 point probe head
- Resistivity Reference wafer
Measurement principles & methods of Resistance Download by PDF file
*If you want PDF file [Measurement principles & methods of Resistance], please click here.