Resistivity Reference Wafer : NRW series｜Products｜The pioneer for Sheet Resistance / Resistivity Measurement NAPSON CORPORATION

NRW series
Resistivity Reference Wafer

Selling Points

NRW series are resistivity reference wafers which proven by Napson’s resistivity measurement system. NRW series use wafers with neutron irradiation, and excellent stability.

Napson’s four-probe resistivity measurement system has been calibrated by standard wafers (NIST, VLSI), and conforms to the standards stipulated by the following SEMI standards, Japanese Industrial Standards (JIS) and American Materials Testing Association (ASTM).

〈Compliance standards〉

[SEMI Standards]
SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02

[American Society for Testing and Materials]
ASTM-F-84-99(SEMI-MF84), ASTM-F-374-00a, ASTM-F-390-11, ASTM-F-1529-97

[Japan Industrial Standards]
JIS-H-0602-1995

Details

Specification

〈Material〉Silicon
〈Production method〉FZ
〈Wafer finish frontside/backside〉Lapped
〈Wafer orientation〉Wafer orientation：(1-1-1) ± 1 deg.
※NRW-8-52 (1-0-0) ± 1 deg.
〈Doping〉N-type (Phosphorous)
〈Wafer size〉Φ100mm(4inch)
〈Wafer Thickness〉*Depends on NRW wafer type. Please refer following specs.

Lineups

Types	Resistivity (Ohm.cm)	Thickness （µm）	Sheet resistance （Ohm/sq） *calculated value
NRW-6-16	16.00 ± 2.00	650.00 ± 25.00	Approx. 250
NRW-7-42	41.50 ± 3.50	650.00 ± 25.00	Approx. 650
NRW-8-52	52.00 ± 2.00	650.00 ± 25.00	Approx. 800
NRW-2-110	110.00 ±11.00	580.00 ±10.00	Approx. 2000
NRW-3-200	200.00 ±12.00	675.00 ±25.00	Approx. 3000
NRW-4-330	330.00 ±25.00	675.00 ±25.00	Approx. 5000
NRW-5-550	550.00 ±50.00	450.00 ±25.00	Approx. 12000