SRS-2010
Spread resistance for slanting polished sample of semiconductor by tow kinematically-mounted probe contacting
Selling Points
Resitivity map along with depth direction, thickness of epitaxial , depth of PN junctin and carier density profiles
Details
Applications
- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
Sample sizes
Please contact us in details
Measuring range
1~10E+9 Ω[Spread restance]
Carrier density range:2E+13 ~ 5E+19 cm2 [N-type silicon]
2E+14 ~ 7E+19 cm2 [P-type silicon]
Product Information
Products Lineups
- Contact type resistance measurement
- Non-Contact type resistance measurement
- Lifetime measurement
- Flatness/Thickness measurement
- Spreading resistance measurement
- PN type checker
- 4 point probe head
- Resistivity Reference wafer
Measurement principles & methods of Resistance Download by PDF file
*If you want PDF file [Measurement principles & methods of Resistance], please click here.